JPS63201047U - - Google Patents
Info
- Publication number
- JPS63201047U JPS63201047U JP9183287U JP9183287U JPS63201047U JP S63201047 U JPS63201047 U JP S63201047U JP 9183287 U JP9183287 U JP 9183287U JP 9183287 U JP9183287 U JP 9183287U JP S63201047 U JPS63201047 U JP S63201047U
- Authority
- JP
- Japan
- Prior art keywords
- grindstone
- semiconductor wafer
- workhead
- rotation shaft
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 5
- 239000013078 crystal Substances 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9183287U JPH052278Y2 (en]) | 1987-06-15 | 1987-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9183287U JPH052278Y2 (en]) | 1987-06-15 | 1987-06-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63201047U true JPS63201047U (en]) | 1988-12-26 |
| JPH052278Y2 JPH052278Y2 (en]) | 1993-01-20 |
Family
ID=30952974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9183287U Expired - Lifetime JPH052278Y2 (en]) | 1987-06-15 | 1987-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH052278Y2 (en]) |
-
1987
- 1987-06-15 JP JP9183287U patent/JPH052278Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH052278Y2 (en]) | 1993-01-20 |